Polarity Inversion of SiC(0001) during the Al Doped PVT...

Materials Science Forum 2015 / 6 Vol. 821-823

Polarity Inversion of SiC(0001) during the Al Doped PVT Growth

Eto, Kazuma, Miura, Tomonori, Kato, Tomohisa, Okumura, Hajime
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.73
Date:
June, 2015
File:
PDF, 2.37 MB
english, 2015
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