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SIMS Analysis of Fe Impurity Concentration in a PVT-Grown 4H-SiC Bulk Crystal and Source Powders
Iwamoto, Naoya, Azarov, Alexander, Vines, Lasse, Moe, Anne Marie M., Svensson, Bengt G.Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.81
Date:
June, 2015
File:
PDF, 581 KB
english, 2015