Preparation of multi-layer carbon nitride films by alternate processes of magnetron sputtering and ion beam implantation
Tetsuya Shibata, Yun-Sik Jin, Yoshinobu Matsuda, Hiroshi FujiyamaVolume:
131
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00782-9
File:
PDF, 215 KB
english, 2000