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Humidity resistant MoSx films prepared by pulsed magnetron sputtering
W Lauwerens, Jihui Wang, J Navratil, E Wieërs, J D’haen, L.M Stals, J.P Celis, Y BruynseraedeVolume:
131
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00796-9
File:
PDF, 427 KB
english, 2000