The dependence of GaN growth rate on electron temperature in an ECR plasma
Yi-Kang Pu, Yu-Feng Ren, Si-Ze Yang, Daniel Dywer, Xiao-Guang Zhang, Xiou-Jun JiaVolume:
131
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)00842-2
File:
PDF, 2.83 MB
english, 2000