Etching, smoothing, and deposition with gas-cluster ion...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Etching, smoothing, and deposition with gas-cluster ion beam technology

J.A Greer, D.B Fenner, J Hautala, L.P Allen, V DiFilippo, N Toyoda, I Yamada, J Matsuo, E Minami, H Katsumata
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
133-134
Year:
2000
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(00)00876-8
File:
PDF, 1.31 MB
english, 2000
Conversion to is in progress
Conversion to is failed