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Reactive deposition of nitrides and oxides using a twin-cathode inverted cylindrical magnetron
V.W Lindberg, A.R Woodard, D.A GlockerVolume:
133-134
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00920-8
File:
PDF, 152 KB
english, 2000