Characteristics of carbon incorporated BN films deposited...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Characteristics of carbon incorporated BN films deposited by radio frequency PACVD

H.S. Kim, I.H. Choi, Y.-J. Baik
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Volume:
133-134
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00924-5
File:
PDF, 423 KB
english, 2000
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