The surface damage in titanium nitride associated with...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

The surface damage in titanium nitride associated with lateral sputtering by argon cluster ions

Anthony J. Perry, Steve J. Bull, Alex Dommann, David Rafaja, Blake P. Wood, Markus Michler
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Volume:
133-134
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00931-2
File:
PDF, 1.17 MB
english, 2000
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