Mechanical and adhesion properties of Al/AlN multilayered...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

Mechanical and adhesion properties of Al/AlN multilayered thin films

Jeong Hoon Lee, Won Mok Kim, Taek Sung Lee, Moon Kyo Chung, Byung-ki Cheong, Soon Gwang Kim
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Volume:
133-134
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(00)00937-3
File:
PDF, 987 KB
english, 2000
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