Textured titanium oxide thin films produced by vacuum arc...

Textured titanium oxide thin films produced by vacuum arc deposition

S Mändl, G Thorwarth, B Rauschenbach
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Volume:
133-134
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00938-5
File:
PDF, 304 KB
english, 2000
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