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Plasma-enhanced CVD of (Ti,Al)N films from chloridic precursors in a DC glow discharge
R Prange, R Cremer, D NeuschützVolume:
133-134
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(00)00941-5
File:
PDF, 869 KB
english, 2000