The effects of metal ion post-implantation on the near...

Surface and Coatings Technology 2000 Vol. 133-134; Iss. none

The effects of metal ion post-implantation on the near surface properties of TiN deposited by CVD

Anthony J Perry, Rafael R Manory, Liam P Ward, Premsagar P Kavuri
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Volume:
133-134
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00942-7
File:
PDF, 131 KB
english, 2000
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