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Effect of ZrCl4 addition on ZrB2 film synthesis in flowing Ar–BCl3 post-discharges
J.F Pierson, T Belmonte, H MichelVolume:
133-134
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)00946-4
File:
PDF, 222 KB
english, 2000