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Laser-assisted plasma-enhanced chemical vapor deposition of silicon nitride thin film
Hung-Sheng Tsai, Gwo-Juinn Jaw, Sheng-Hsiung Chang, Chao-Chia Cheng, Ching-Ting Lee, Hai-Pei LiuVolume:
132
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00972-5
File:
PDF, 277 KB
english, 2000