Characteristics of magnetized inductively coupled plasma source for flat panel display applications
Young-Jun Lee, Hye-Rhee Han, Geun-Young YeomVolume:
133-134
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(00)00978-6
File:
PDF, 222 KB
english, 2000