Modeling of energy distributions for plasma implantation

Surface and Coatings Technology 2001 Vol. 136; Iss. 1-3

Modeling of energy distributions for plasma implantation

Barry P. Linder, Nathan W. Cheung
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Volume:
136
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(00)01042-2
File:
PDF, 325 KB
english, 2001
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