A plasma immersion implantation system for materials...

Surface and Coatings Technology 2001 Vol. 136; Iss. 1-3

A plasma immersion implantation system for materials modification

Michael I Current, Wei Liu, Ian S Roth, Albert J Lamm, William G En, Igor J Malik, Lucia Feng, Michael A Bryan, Shu Qin, Francois J Henley, Chung Chan, Nathan W Cheung
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Volume:
136
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(00)01043-4
File:
PDF, 381 KB
english, 2001
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