![](/img/cover-not-exists.png)
Improvement of mechanical properties of Ti/TiN multilayer film deposited by sputtering
T. Mori, S. Fukuda, Y. TakemuraVolume:
140
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(01)01021-0
File:
PDF, 985 KB
english, 2001