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Deposition of TiN thin films on Si(100) by HCD ion plating
Wen-Jun Chou, Ge-Ping Yu, Jia-Hong HuangVolume:
140
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0257-8972(01)01120-3
File:
PDF, 726 KB
english, 2001