Correlation between the gas composition and the stoichiometry of SnOx films prepared by DC magnetron reactive sputtering
R Snyders, M Wautelet, R Gouttebaron, J.P Dauchot, M HecqVolume:
142-144
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(01)01150-1
File:
PDF, 105 KB
english, 2001