Optimisation and characterisation of a TCP type RF broad...

Surface and Coatings Technology 2001 Vol. 142-144; Iss. none

Optimisation and characterisation of a TCP type RF broad beam ion source

Michael Zeuner, Frank Scholze, Bernd Dathe, Horst Neumann
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Volume:
142-144
Year:
2001
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(01)01219-1
File:
PDF, 453 KB
english, 2001
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