Microstructure, mechanical properties, and wetting behavior of Si–C–N thin films grown by reactive magnetron sputtering
Torun Berlind, Niklas Hellgren, Mats P. Johansson, Lars HultmanVolume:
141
Year:
2001
Language:
english
Pages:
11
DOI:
10.1016/s0257-8972(01)01236-1
File:
PDF, 1.11 MB
english, 2001