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Ion-beam-assisted deposition of CNx films
Ning Jin, Lu Yusun, Zhai Houming, Feng Yudong, Wang YiVolume:
145
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(01)01266-x
File:
PDF, 101 KB
english, 2001