Co-deposition of titanium/polytetrafluoroethylene films by unbalanced magnetron sputtering
Chaozong Liu, R.G Fairhurst, L Ren, S.M Green, J Tong, R.D ArnellVolume:
149
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(01)01443-8
File:
PDF, 1.00 MB
english, 2002