Characteristics of He/O2 atmospheric pressure glow...

Surface and Coatings Technology 2001 Vol. 146-147; Iss. none

Characteristics of He/O2 atmospheric pressure glow discharge and its dry etching properties of organic materials

Yong-Hyuk Lee, Chang-Heon Yi, Min-Jae Chung, Geun-Young Yeom
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
146-147
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(01)01459-1
File:
PDF, 333 KB
english, 2001
Conversion to is in progress
Conversion to is failed