Observation of boron nitride thin film delamination due to...

Observation of boron nitride thin film delamination due to humidity

J Möller, D Reiche, M Bobeth, W Pompe
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Volume:
150
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(01)01500-6
File:
PDF, 1.34 MB
english, 2002
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