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Effect of nitrogen incorporation in CNx thin films deposited by RF magnetron sputtering
N. Mubumbila, P.-Y. Tessier, B. Angleraud, G. TurbanVolume:
151-152
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(01)01569-9
File:
PDF, 396 KB
english, 2002