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Ion beam synthesis of α-CNx:H films
V. Kopustinskas, Š. Meškinis, V. Grigaliūnas, S. Tamulevičius, M. Puc≐ta, G. Niaura, R. TomašiūnasVolume:
151-152
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(01)01573-0
File:
PDF, 122 KB
english, 2002