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Surface and bulk characterizations of CNx thin films made by r.f. magnetron sputtering
F. Tétard, P. Djemia, B. Angleraud, N. Mubumbila, P.Y. TessierVolume:
151-152
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(01)01574-2
File:
PDF, 89 KB
english, 2002