Preparation of transparent and conductive Al-doped ZnO thin...

Surface and Coatings Technology 2002 Vol. 151-152; Iss. none

Preparation of transparent and conductive Al-doped ZnO thin films by ECR plasma enhanced CVD

A. Martı́n, J.P. Espinós, A. Justo, J.P. Holgado, F. Yubero, A.R. González-Elipe
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Volume:
151-152
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(01)01609-7
File:
PDF, 102 KB
english, 2002
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