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Effect of power mode, target type and liquid nitrogen trap on the structure and tribological properties of MoSx coatings
Jihui Wang, W. Lauwerens, E. Wieers, L.M. Stals, Jiawen He, J.P. CelisVolume:
153
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0257-8972(01)01665-6
File:
PDF, 265 KB
english, 2002