The effects of structure, composition, and chemical bonding on the mechanical properties of Si-aC:H thin films
Ryan D Evans, Gary L Doll, Philip W Morrison Jr, James Bentley, Karren L More, Jeffrey T GlassVolume:
157
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0257-8972(02)00164-0
File:
PDF, 1.09 MB
english, 2002