Ionization of hexamethyldisilane for SiC deposition
Takae Takeuchi, Motoko Tanaka, Takaomi Matsutani, Masato KiuchiVolume:
158-159
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(02)00261-x
File:
PDF, 80 KB
english, 2002