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Nanostructured CoSi2 layers formed on Si with high density Co+ ion beams
N.N Gerasimenko, V.Yu Troitski, M.N Pavluchenko, K.K DjamanbalinVolume:
158-159
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(02)00266-9
File:
PDF, 817 KB
english, 2002