Influence of nitrogen–argon gas mixtures on reactive...

Surface and Coatings Technology 2002 Vol. 160; Iss. 1

Influence of nitrogen–argon gas mixtures on reactive magnetron sputtering of hard Si–C–N films

Jaroslav Vlček, Martin Kormunda, Jiřı́ Čı́zek, Vratislav Peřina, Josef Zemek
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Volume:
160
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0257-8972(02)00328-6
File:
PDF, 214 KB
english, 2002
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