![](/img/cover-not-exists.png)
Moisture barrier properties of plasma enhanced chemical vapor deposited SiCxNy films on polyethylene naphthalate sheets and epoxy molding compound
Gisela Kaltenpoth, Walter Siebert, Frank Stubhan, Xuhong Wang, Le LuoVolume:
161
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(02)00419-x
File:
PDF, 137 KB
english, 2002