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The properties of aluminum oxide and nitride films prepared by d.c. sputter-deposition from metallic targets
Tilo P. Drüsedau, Thomas Neubert, Andreas N. PanckowVolume:
163-164
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(02)00484-x
File:
PDF, 164 KB
english, 2003