The properties of aluminum oxide and nitride films prepared...

The properties of aluminum oxide and nitride films prepared by d.c. sputter-deposition from metallic targets

Tilo P. Drüsedau, Thomas Neubert, Andreas N. Panckow
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
163-164
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(02)00484-x
File:
PDF, 164 KB
english, 2003
Conversion to is in progress
Conversion to is failed