SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Fabrication of microfluidic chips using lithographic patterning and adhesive bonding of the thick negative photoresist AZ 125 nXT
Sánchez-Rojas, José Luis, Brama, Riccardo, Knoll, Thorsten, Bergmann, Andreas, Nußbaum, DominicVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2178812
File:
PDF, 538 KB
english, 2015