Effects of carbon incorporation in tungsten carbide films deposited by r.f. magnetron sputtering: single layers and multilayers
C Rincón, J Romero, J Esteve, E Martı́nez, A LousaVolume:
163-164
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(02)00635-7
File:
PDF, 382 KB
english, 2003