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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Gradient Index, Miniature, and Diffractive Optical Systems III - Diffractive-refractive hybrid microscope objective for 193-nm inspection systems
Brunner, Robert, Steiner, Reinhard, Rudolf, Klaus, Dobschal, Hans-Juergen, Suleski, Thomas J.Volume:
5177
Year:
2003
Language:
english
DOI:
10.1117/12.498325
File:
PDF, 559 KB
english, 2003