Low-friction TiN coatings deposited by PACVD
M Stoiber, E Badisch, C Lugmair, C MittererVolume:
163-164
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(02)00642-4
File:
PDF, 559 KB
english, 2003