Characteristics and high water-repellency of a-C:H films...

Surface and Coatings Technology 2003 Vol. 162; Iss. 2-3

Characteristics and high water-repellency of a-C:H films deposited by r.f. PECVD

Je-deok Kim, Kyung-hwang Lee, Kyu-young Kim, Hiroyuki Sugimura, Osamu Takai, Yunying Wu, Yasushi Inoue
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Volume:
162
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0257-8972(02)00704-1
File:
PDF, 455 KB
english, 2003
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