Mechanical properties of B–C–N films synthesized by an electron beam excited plasma-CVD method
Takeshi Hasegawa, Kazuhiro Yamamoto, Yozo Kakudate, Masahito BanVolume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00039-2
File:
PDF, 280 KB
english, 2003