Computer simulation of thin film growth with defect...

Surface and Coatings Technology 2003 Vol. 169-170; Iss. none

Computer simulation of thin film growth with defect formation

Y. Kaneko, Y. Hiwatari, K. Ohara, T. Murakami
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Volume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00082-3
File:
PDF, 358 KB
english, 2003
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