Energy measurements of sheath-accelerated secondary electrons in plasma immersion ion implantation
Keiji Nakamura, Mitsuaki Tanaka, Hideo SugaiVolume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00087-2
File:
PDF, 218 KB
english, 2003