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Refractive index control and etching of C–S–Au film by plasma processes
Masaki Matushita, Md. Abul Kashem, Shinzo MoritaVolume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00091-4
File:
PDF, 87 KB
english, 2003