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Preparation of transparent conductive thin films by facing targets sputtering system
Jin Seok Yang, Ha Yoon Seong, Min Jong Keum, In Hwan Son, Kyung Hwan KimVolume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00101-4
File:
PDF, 375 KB
english, 2003