Macroparticles on titanium nitiride thin film prepared by...

Surface and Coatings Technology 2003 Vol. 169-170; Iss. none

Macroparticles on titanium nitiride thin film prepared by cathodic-arc plasma-based ion implantation and deposition

Masao Kumagai, Ken Yukimura, Eiji Kuze, Toshiro Maruyama, Mamoru Kohata, Ken Numata, Hidenori Saito, Xinxin Ma
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Volume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00135-x
File:
PDF, 1.02 MB
english, 2003
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