Preparation and properties of nanoscale multilayered TiN/AlN coatings deposited by plasma enhanced chemical vapor deposition
Ju-Wan Lim, Seung Hoon Lee, Jung-Joong LeeVolume:
169-170
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(03)00199-3
File:
PDF, 681 KB
english, 2003